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Yue, W; Teng, M; Peng, Y; Xia, F; Tsao, P; Gao, Y; Ikeuch, S; Aida, Y; Umezawa, S; Lin, L (, A Solid-State Sensors, Actuators and Microsystems Workshop June 2-6, Hilton head Island, SC, 2024)
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Yue, W; Teng, M; Peng, Y; Xia, F; Tsao, P; Gao, Y; Ikeuch, S; Aida, Y; Umezawa, S; Lin, L (, Transducers Research Foundation)This work reports a platform based on ultrasound for mid-air particle manipulations using a 2×2 piezoelectric micromachined ultrasonic transducer (pMUT) array. Three achievements have been demonstrated as compared to the state-of-art: (1) high SPL (sound pressure level) of 120 dB at a distance 12 mm away by an individual lithium-niobate pMUT; (2) a numerically simulated and experimentally demonstrated 2D focal point control scheme by adjusting the phase-delay of individual pMUTs; and (3) the experimental demonstration of moving a 0.7 mg foam plastic particle of 12 mm away in the mid-air by ~1.8 mm. As such, this work shows the potential for practical applications in the broad fields of non-contact actuations, including particle manipulations in microfluidics, touchless haptic sensations, … etc.more » « less
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Teng, M; Yue, W; Peng, Y; Tsao, P; Deng, H; Xia, F; Lin, L (, 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS))
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Xia, F; Peng, Y; Pala, S; Arakawa, R; Yue, W; Tsao, P; Chen, C_H; Liu, H; Teng, M; Park, J_H; et al (, 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS))
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